Issued Patents All Time
Showing 826–850 of 1,397 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE39195 | Polishing pad refurbisher for in situ, real-time conditioning and cleaning of a polishing pad used in chemical-mechanical polishing of microelectronic substrates | Trung T. Doan | 2006-07-18 |
| 7067894 | Semiconductor devices using anti-reflective coatings | Zhiping Yin | 2006-06-27 |
| 7060637 | Methods of forming intermediate semiconductor device structures using spin-on, photopatternable, interlayer dielectric materials | Weimin Li | 2006-06-13 |
| 7056833 | Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition | Neal R. Rueger, William Budge, Weimin Li | 2006-06-06 |
| 7053432 | Enhanced surface area capacitor fabrication methods | Garo Derderian | 2006-05-30 |
| 7053010 | Methods of depositing silicon dioxide comprising layers in the fabrication of integrated circuitry, methods of forming trench isolation, and methods of forming arrays of memory cells | Weimin Li | 2006-05-30 |
| 7052997 | Method to form etch and/or CMP stop layers | — | 2006-05-30 |
| 7052972 | Method for forming sublithographic features during the manufacture of a semiconductor device and a resulting in-process apparatus | Sukesh Sandhu | 2006-05-30 |
| 7050708 | Delivery of solid chemical precursors | — | 2006-05-23 |
| 7041547 | Methods of forming polished material and methods of forming isolation regions | Shubneesh Batra | 2006-05-09 |
| 7038263 | Integrated circuits with rhodium-rich structures | Haining Yang, Dan Gealy, Howard E. Rhodes, Mark Visokay | 2006-05-02 |
| 7037730 | Capacitor with high dielectric constant materials and method of making | Cem Basceri, Mark Visokay | 2006-05-02 |
| 7033642 | Plasma enhanced chemical vapor deposition method of forming a titanium silicide comprising layer | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Philip Campbell | 2006-04-25 |
| 7033939 | Chemistry for chemical vapor deposition of titanium containing films | Sujit Sharan, Howard E. Rhodes, Philip J. Ireland | 2006-04-25 |
| 7033946 | Plasmaless dry contact cleaning method using interhalogen compounds | Donald L. Westmoreland | 2006-04-25 |
| 7030037 | Atomic layer deposition apparatus and method | Trung T. Doan | 2006-04-18 |
| 7026642 | Vertical tunneling transistor | — | 2006-04-11 |
| 7023043 | Top electrode in a strongly oxidizing environment | Cem Basceri, Howard E. Rhodes, F. Daniel Gealy, Thomas M. Graettinger | 2006-04-04 |
| 7022605 | Atomic layer deposition methods | Trung T. Doan, Guy T. Blalock | 2006-04-04 |
| 7022618 | Method of forming a conductive contact | Sujit Sharan, Guy T. Blalock | 2006-04-04 |
| 7018908 | Methods of forming silicon dioxide layers, and methods of forming trench isolation regions | Sujit Sharan | 2006-03-28 |
| 7020365 | Resistive heater for thermo optic device | Guy T. Blalock | 2006-03-28 |
| 7018469 | Atomic layer deposition methods of forming silicon dioxide comprising layers | Li Li, Weimin Li | 2006-03-28 |
| 7015532 | Capacitor compatible with high dielectric constant materials having a low contact resistance layer and the method for forming same | Pierre C. Fazan | 2006-03-21 |
| 7011733 | Method and apparatus for depositing films | — | 2006-03-14 |