Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221558 | Bottom antireflective coating forming composition | Hiroshi HITOKAWA, Tetsumasa Takaichi, Shunji Kawato | 2022-01-11 |
| 11079680 | High heat resistance resist composition and pattern forming method using the same | Masato Suzuki, Hiroshi HITOKAWA | 2021-08-03 |
| 11029599 | Chemically amplified positive photoresist composition and pattern forming method using same | Tetsumasa Takaichi, Shunji Kawato, Masato Suzuki, Kazumichi Akashi | 2021-06-08 |
| 10859916 | Composition for forming fine pattern and method for forming fine pattern using the same | Yoshihiro Miyamoto, Takayuki SAO | 2020-12-08 |
| 10106428 | Method for producing surface-modified silica nanoparticles, and surface-modified silica nanoparticles | Hiroshi Yanagita, Shigemasa Nakasugi, Hiroshi HITOKAWA, Katsuyuki Sakamoto | 2018-10-23 |
| 8852855 | Upper surface antireflective film forming composition and pattern forming method using same | Takayuki SAO | 2014-10-07 |
| 8039202 | Positive-working photoimageable bottom antireflective coating | Yu Sui, Hengpeng Wu, Wenbing Kang, Mark Neisser, Shuji Ding-Lee +3 more | 2011-10-18 |