Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859916 | Composition for forming fine pattern and method for forming fine pattern using the same | Yoshihiro Miyamoto, Tomohide KATAYAMA | 2020-12-08 |
| 8852855 | Upper surface antireflective film forming composition and pattern forming method using same | Tomohide KATAYAMA | 2014-10-07 |