Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221558 | Bottom antireflective coating forming composition | Tetsumasa Takaichi, Shunji Kawato, Tomohide KATAYAMA | 2022-01-11 |
| 11079680 | High heat resistance resist composition and pattern forming method using the same | Masato Suzuki, Tomohide KATAYAMA | 2021-08-03 |
| 10106428 | Method for producing surface-modified silica nanoparticles, and surface-modified silica nanoparticles | Hiroshi Yanagita, Shigemasa Nakasugi, Tomohide KATAYAMA, Katsuyuki Sakamoto | 2018-10-23 |