Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221558 | Bottom antireflective coating forming composition | Hiroshi HITOKAWA, Shunji Kawato, Tomohide KATAYAMA | 2022-01-11 |
| 11163233 | Chemically amplified positive type photoresist composition and pattern forming method using the same | Masato Suzuki, Shunji Kawato, Kazumichi Akashi | 2021-11-02 |
| 11029599 | Chemically amplified positive photoresist composition and pattern forming method using same | Shunji Kawato, Masato Suzuki, Kazumichi Akashi, Tomohide KATAYAMA | 2021-06-08 |