| 10221500 |
System for forming an ingot including crucible and conditioning members |
Salvador Zepeda, Richard J. Phillips, Christopher Vaughn Luers, Steven L. Kimbel, John D. Holder +4 more |
2019-03-05 |
| 8857214 |
Methods for producing crucibles with a reduced amount of bubbles |
Steven L. Kimbel, Richard J. Phillips, Shailendra B. Rathod |
2014-10-14 |
| 8691008 |
Systems for weighing a pulled object |
Richard J. Phillips |
2014-04-08 |
| 8551247 |
Generating a pumping force in a silicon melt by applying a time-varying magnetic field |
Hariprasad Sreedharamurthy, Milind Kulkarni |
2013-10-08 |
| 8524319 |
Methods for producing crucibles with a reduced amount of bubbles |
Steven L. Kimbel, Richard J. Phillips, Shailendra B. Rathod |
2013-09-03 |
| 8398765 |
Controlling a melt-solid interface shape of a growing silicon crystal using an unbalanced magnetic field and iso-rotation |
Hariprasad Sreedharamurthy, Milind Kulkarni, Richard G. Schrenker, Joseph C. Holzer |
2013-03-19 |
| 8347740 |
Systems for weighing a pulled object having a changing weight |
— |
2013-01-08 |
| 7291221 |
Electromagnetic pumping of liquid silicon in a crystal growing process |
— |
2007-11-06 |
| 7097718 |
Single crystal silicon wafer having an epitaxial layer substantially free from grown-in defects |
Luciano Mule'Stagno, Lu Fei, Joseph C. Holzer, Robert J. Falster |
2006-08-29 |
| 6913647 |
Process for cooling a silicon ingot having a vacancy dominated region to produce defect free silicon |
Robert J. Falster |
2005-07-05 |
| 6686260 |
Process for producing thermally annealed wafers having improved internal gettering |
Robert J. Falster, Martin Jeffrey Binns |
2004-02-03 |
| 6565649 |
Epitaxial wafer substantially free of grown-in defects |
Luciano Mule′Stagno, Lu Fei, Joseph C. Holzer, Robert J. Falster |
2003-05-20 |
| 6562123 |
Process for growing defect-free silicon wherein the grown silicon is cooled in a separate chamber |
Robert J. Falster |
2003-05-13 |
| 6361619 |
Thermally annealed wafers having improved internal gettering |
Robert J. Falster, Martin Jeffrey Binns |
2002-03-26 |
| 6328795 |
Process for growth of defect free silicon crystals of arbitrarily large diameters |
Robert J. Falster |
2001-12-11 |
| 6284039 |
Epitaxial silicon wafers substantially free of grown-in defects |
Luciano Mule'Stagno, Lu Fei, Joseph C. Holzer, Robert J. Falster |
2001-09-04 |
| 6183553 |
Process and apparatus for preparation of silicon crystals with reduced metal content |
John D. Holder, Steven M. Joslin |
2001-02-06 |
| 5935328 |
Apparatus for use in crystal pulling |
Carl F. Cherko, Richard G. Schrenker, Dick S. Williams |
1999-08-10 |
| 5779791 |
Process for controlling thermal history of Czochralski-grown silicon |
Sadasivam Chandrasekhar, Robert J. Falster, Joseph C. Holzer, Kyong-Min Kim, Steven L. Kimbel +1 more |
1998-07-14 |
| 5766341 |
Method for rotating a crucible of a crystal pulling machine |
Steven L. Kimbel, Cynthia Hall |
1998-06-16 |
| 5676751 |
Rapid cooling of CZ silicon crystal growth system |
Mohsen Banan, Kyong-Min Kim |
1997-10-14 |
| 5593498 |
Apparatus for rotating a crucible of a crystal pulling machine |
Steven L. Kimbel, Cynthia Hall |
1997-01-14 |
| 5582642 |
Apparatus and method for adjusting the position of a pull wire of a crystal pulling machine |
Dick S. Williams, Richard G. Schrenker, Verlin A. Lauher |
1996-12-10 |
| 5550374 |
Methods and apparatus for determining interstitial oxygen content of relatively large diameter silicon crystals by infrared spectroscopy |
Joseph C. Holzer, Klaus Drescher |
1996-08-27 |
| 4666532 |
Denuding silicon substrates with oxygen and halogen |
Claudia P. Reed, Roger W. Shaw |
1987-05-19 |