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— |
2006-10-24 |
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Method of proximity correction with relative segmentation |
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Method and apparatus for general systematic application of proximity correction |
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| 5900338 |
Performing optical proximity correction with the aid of design rule checkers |
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1999-05-04 |
| 5705301 |
Performing optical proximity correction with the aid of design rule checkers |
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1998-01-06 |
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Multi-level resolution lithography |
— |
1997-12-30 |
