Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7662253 | Apparatus for the removal of a metal oxide from a substrate and methods therefor | Hyungsuk Alexander Yoon, Yezdi Dordi, Andrew D. Bailey, III | 2010-02-16 |
| 7592259 | Methods and systems for barrier layer surface passivation | Yezdi Dordi, John M. Boyd, Fritz Redeker, Tiruchirapalli Arunagiri, Alex Yoon | 2009-09-22 |
| 7582565 | Method and apparatus for semiconductor wafer planarization | Fred C. Redeker, John M. Boyd, Yezdi Dordi, Bob Maraschin | 2009-09-01 |
| 7368017 | Method and apparatus for semiconductor wafer planarization | Fred C. Redeker, John M. Boyd, Yezdi Dordi, Bob Maraschin | 2008-05-06 |
| 7358186 | Method and apparatus for material deposition in semiconductor fabrication | Yezdi Dordi, John M. Boyd, Bob Maraschin, Fred C. Redeker, Joel M. Cook | 2008-04-15 |
| 7297190 | Plating solutions for electroless deposition of copper | Yezdi Dordi, Algirdas Vaskelis, Eugenijus Norkus, Jane Jaciauskiene, Aldona Jagminiene | 2007-11-20 |
| 7040332 | Method and apparatus for megasonic cleaning with reflected acoustic waves | John M. Boyd, Fred C. Redeker, Randolph Treur | 2006-05-09 |
| 6995067 | Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency | John M. Boyd, Andras Kuthi, Michael G. R. Smith, Thomas W. Anderson | 2006-02-07 |