Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE38097 | Chemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection ports | David Trussell, C. Robert Koemtzopoulos | 2003-04-29 |
| 6303044 | Method of and apparatus for detecting and controlling in situ cleaning time of vacuum processing chambers | C. Robert Koemtzopoulos | 2001-10-16 |
| 6071573 | Process for precoating plasma CVD reactors | C. Robert Koemtzopoulos | 2000-06-06 |
| 6017414 | Method of and apparatus for detecting and controlling in situ cleaning time of vacuum processing chambers | C. Robert Koemtzopoulos | 2000-01-25 |
| 6016766 | Microwave plasma processor | David R. Pirkle, John Daugherty, Michael Giarratano, C. Robert Koemtzopoulos | 2000-01-25 |
| 5988187 | Chemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection ports | David Trussell, C. Robert Koemtzopoulos | 1999-11-23 |
| 5911833 | Method of in-situ cleaning of a chuck within a plasma chamber | Dean R. Denison, William Harshbarger, Anwar Husain, C. Robert Koemtzopoulos, David Trussell | 1999-06-15 |