Issued Patents All Time
Showing 26–50 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929531 | System and method for metal residue detection and mapping within a multi-step sequence | Yehiel Gotkis, David Hemker, Nicolas Bright, Rodney Kistler | 2005-08-16 |
| 6925348 | Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control | Rodney Kistler, David Hemker, Yehiel Gotkis, Bruno Morel, Damon Vincent Williams | 2005-08-02 |
| 6922053 | Complementary sensors metrological process and method and apparatus for implementing the same | Yehiel Gotkis, Rodney Kistler, David Hemker, Nicolas Bright | 2005-07-26 |
| 6902466 | Oscillating chemical mechanical planarization apparatus | Miguel Saldana | 2005-06-07 |
| 6896596 | Polishing pad ironing system | Yehiel Gotkis, Rodney Kistler | 2005-05-24 |
| 6894491 | Method and apparatus for metrological process control implementing complementary sensors | Yehiel Gotkis, Rodney Kistler, David Hemker, Nicolas Bright | 2005-05-17 |
| 6808442 | Apparatus for removal/remaining thickness profile manipulation | David Wei, Yehiel Gotkis, John M. Boyd, Rod Kistler | 2004-10-26 |
| 6808590 | Method and apparatus of arrayed sensors for metrological control | Yehiel Gotkis, Rodney Kistler, David Hemker, Nicolas Bright | 2004-10-26 |
| 6769961 | Chemical mechanical planarization (CMP) apparatus | Rodney Kistler | 2004-08-03 |
| 6719874 | Active retaining ring support | Yehiel Gotkis, Miguel Saldana, David Wei, Damon Vincent Williams | 2004-04-13 |
| 6716299 | Profiled retaining ring for chemical mechanical planarization | Yehiel Gotkis, Jeffrey Yung | 2004-04-06 |
| 6585572 | Subaperture chemical mechanical polishing system | Miguel Saldana, John M. Boyd, Yehiel Gotkis | 2003-07-01 |
| 6579157 | Polishing pad ironing system and method for implementing the same | Yehiel Gotkis, Rodney Kistler | 2003-06-17 |
| 6579407 | Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system | John M. Boyd, Miguel Saldana | 2003-06-17 |
| 6561870 | Adjustable force applying air platen and spindle system, and methods for using the same | Miguel Saldana | 2003-05-13 |
| 6520833 | Oscillating fixed abrasive CMP system and methods for implementing the same | Miguel Saldana | 2003-02-18 |
| 6408863 | Seal configuration for use with a motor drive assembly in a microelectronic work piece processing system | — | 2002-06-25 |
| 6386962 | Wafer carrier with groove for decoupling retainer ring from water | Yehiel Gotkis | 2002-05-14 |
| 6105592 | Gas intake assembly for a wafer processing system | Raymon F. Thompson, Daniel P. Bexten | 2000-08-22 |
| 6098641 | Motor drive assembly for a semiconductor wafer processing system | — | 2000-08-08 |
| 5972127 | Methods for centrifugally cleaning wafer carriers | Raymon F. Thompson | 1999-10-26 |
| 5738128 | Centrifugal wafer carrier cleaning apparatus | Raymon F. Thompson | 1998-04-14 |
| 5575641 | Semiconductor processor opening and closure construction | Ronald J. Ray, Daniel Durado | 1996-11-19 |
| 5573023 | Single wafer processor apparatus | Raymon F. Thompson | 1996-11-12 |
| 5562113 | Centrifugal wafer carrier cleaning apparatus | Raymon F. Thompson | 1996-10-08 |