Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7751046 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad +2 more | 2010-07-06 |
| 7656528 | Periodic patterns and technique to control misalignment between two layers | Mike Adel, Michael Friedmann, Michael Faeyrman | 2010-02-02 |
| 7173699 | Spectroscopic scatterometer system | Yiping Xu | 2007-02-06 |
| 6590656 | Spectroscopic scatterometer system | Yiping Xu | 2003-07-08 |
| 6483580 | Spectroscopic scatterometer system | Yiping Xu | 2002-11-19 |
| 5073010 | Optically addressable spatial light modulator having a distorted helix ferroelectric liquid crystal member | Kristina M. Johnson, Chongchang Mao | 1991-12-17 |