Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7898661 | Spectroscopic scatterometer system | Ibrahim Abdulhalm | 2011-03-01 |
| 7859659 | Spectroscopic scatterometer system | Ibrahim Abdulhalm | 2010-12-28 |
| 7173699 | Spectroscopic scatterometer system | Ibrahim Abdulhalim | 2007-02-06 |
| 6590656 | Spectroscopic scatterometer system | Ibrahim Abdulhalim | 2003-07-08 |
| 6483580 | Spectroscopic scatterometer system | Ibrahim Abdulhalim | 2002-11-19 |
| 6358014 | Composite spinner and method of making the same | Chen-Yu Chou, Gerald Alexander Pauley | 2002-03-19 |
| 5555471 | Method for measuring thin-film thickness and step height on the surface of thin-film/substrate test samples by phase-shifting interferometry | Yuan Li | 1996-09-10 |
| 5321497 | Interferometric integration technique and apparatus to confine 2.pi. discontinuity | Chiayu Ai | 1994-06-14 |