Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7515253 | System for measuring a sample with a layer containing a periodic diffracting structure | Noah Bareket, Guoheng Zhao | 2009-04-07 |
| 7511830 | System for scatterometric measurements and applications | Anatloy Fabrikant, Guoheng Zhao, Mehrdad Nikoonahad | 2009-03-31 |
| 7480047 | Time-domain computation of scattering spectra for use in spectroscopic metrology | Edward Ratner, Andrei Veldman | 2009-01-20 |
| 7301649 | System for scatterometric measurements and applications | Anatoly Fabrikant, Guoheng Zhao, Mehrdad Nikoonahad | 2007-11-27 |
| 7280230 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Anatoly Fabrikant, Mehrdad Nikoonahad, Ady Levy, Noah Bareket +2 more | 2007-10-09 |
| 7175945 | Focus masking structures, focus patterns and measurements thereof | Walter D. Mieher, Ady Levy | 2007-02-13 |
| 7099005 | System for scatterometric measurements and applications | Anatoly Fabrikant, Guoheng Zhao, Mehrdad Nikoonahad | 2006-08-29 |
| 6884552 | Focus masking structures, focus patterns and measurements thereof | Walter D. Mieher, Ady Levy | 2005-04-26 |