Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6701512 | Focus monitoring method, exposure apparatus, and exposure mask | Takumichi Sutani, Takashi Sato, Takashi Sakamoto, Masafumi Asano, Soichi Inoue | 2004-03-02 |
| 6667139 | Method of manufacturing semiconductor device | Masafumi Asano, Kyoko Izuha | 2003-12-23 |
| 6440616 | Mask and method for focus monitoring | Kyoko Izuha, Soichi Inoue | 2002-08-27 |
| 6376139 | Control method for exposure apparatus and control method for semiconductor manufacturing apparatus | Soichi Inoue, Kenji Kawano, Shinichi Ito, Ichiro Mori | 2002-04-23 |
| 6317198 | Method of examining an exposure tool | Kazuya Sato, Satoshi Tanaka, Soichi Inoue | 2001-11-13 |
| 6252651 | Exposure method and exposure apparatus using it | Satoshi Tanaka, Akiko Mimotogi, Shoji Mimotogi, Soichi Inoue | 2001-06-26 |
| 6226074 | Exposure monitor mask, exposure adjusting method and method of manufacturing semiconductor devices | Soichi Inoue, Hiroshi Nomura, Ichiro Mori | 2001-05-01 |
| 6107013 | Exposure method and exposure apparatus using it | Satoshi Tanaka, Akiko Mimotogi, Shoji Mimotogi, Soichi Inoue | 2000-08-22 |
| 5733687 | Photomask, exposing method using photomask, and manufacturing method of photomask | Satoshi Tanaka, Shoji Mimotogi, Soichi Inoue | 1998-03-31 |
| 5707501 | Filter manufacturing apparatus | Soichi Inoue, Shin Ito, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1998-01-13 |
| 5673103 | Exposure apparatus and method | Soichi Inoue, Satoshi Tanaka | 1997-09-30 |
| 5627626 | Projectin exposure apparatus | Soichi Inoue, Shin Ito, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1997-05-06 |
| 5621498 | Projection exposure apparatus | Soichi Inoue, Shin Ito, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1997-04-15 |