Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569061 | Multibeam scanning apparatus and multibeam scanning method | — | 2023-01-31 |
| 11376266 | Antitumor agent | Hideyuki Saya, Kenji Tsuchihashi, Kentaro Suina, Nobuhiro Nishiyama, Hiroyasu Takemoto +5 more | 2022-07-05 |
| 10803576 | Defect inspection apparatus and defect inspection method | Kenji Wakisaka | 2020-10-13 |
| 10677743 | Inspection apparatus and inspection method | Keitarou Suzuki, Kouta Kameishi | 2020-06-09 |
| 10309913 | Pattern inspection method using charged particle beam | — | 2019-06-04 |
| 9960010 | Signal processing method and signal processing apparatus | Motoki KADOWAKI | 2018-05-01 |
| 9814707 | Cancer stem cell proliferation inhibitor and intracellular active oxygen accumulation inducer | Hideyuki Saya, Shogo Okazaki | 2017-11-14 |
| 8357895 | Defect inspection apparatus, defect inspection method, and semiconductor device manufacturing method | — | 2013-01-22 |
| 8121390 | Pattern inspection method, pattern inspection apparatus and semiconductor device manufacturing method | — | 2012-02-21 |
| 8090186 | Pattern inspection apparatus, pattern inspection method, and manufacturing method of semiconductor device | — | 2012-01-03 |
| 7722121 | Reclining device | Hidehiko Fujioka, Hiroshi Takayanagi, Hiroyuki Suzuki | 2010-05-25 |
| 7692163 | Charged particle beam apparatus, defect correcting method, etching method, deposition method, and charge preventing method | — | 2010-04-06 |
| 7640138 | Interconnection pattern inspection method, manufacturing method of semiconductor device and inspection apparatus | — | 2009-12-29 |
| 7491945 | Charged particle beam apparatus, charged particle beam control method, substrate inspection method and method of manufacturing semiconductor device | — | 2009-02-17 |
| 7487286 | Flash memory and method for controlling the memory | Isamu Nakajima | 2009-02-03 |
| 7304320 | Charged beam exposure apparatus, charged beam control method and manufacturing method of semiconductor device | — | 2007-12-04 |
| 7109501 | Charged particle beam lithography system, pattern drawing method, and method of manufacturing semiconductor device | Atsushi Ando | 2006-09-19 |
| 7095023 | Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device | Atsushi Ando | 2006-08-22 |
| 7087551 | Catalyst for use in catalytic oxidation or ammoxidation of propane or isobutane in the gaseous phase | Satoru Komada, Hidenori Hinago, Mamoru Watanabe | 2006-08-08 |
| 7047154 | Interconnection pattern inspection method, manufacturing method of semiconductor device and inspection apparatus | — | 2006-05-16 |
| 7012039 | Oxide catalyst composition | Toru Watanabe | 2006-03-14 |
| 6940080 | Charged particle beam lithography system, lithography method using charged particle beam, method of controlling charged particle beam, and method of manufacturing semiconductor device | Susumu Hashimoto, Yuichiro Yamazaki, Atsushi Ando | 2005-09-06 |
| 6815698 | Charged particle beam exposure system | Yuichiro Yamazaki, Susumu Hashimoto, Motosuke Miyoshi | 2004-11-09 |
| 6563308 | Eddy current loss measuring sensor, thickness measuring system, thickness measuring method, and recorded medium | Yuichiro Yamazaki, Motosuke Miyoshi, Hisashi Kaneko, Tetsuo Matsuda | 2003-05-13 |
| 6008469 | Laser beam branching apparatus | Atsuhiko Kawamura | 1999-12-28 |