Issued Patents All Time
Showing 26–50 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7349092 | System for reducing stress induced effects during determination of fluid optical constants | Thomas E. Tiwald, Galen L. Pfeiffer, Blaine D. Johs, Craig M. Herzinger | 2008-03-25 |
| 7345762 | Control of beam spot size in ellipsometer and the like systems | Martin M. Liphardt, Blaine D. Johs, Duane E. Meyer, James D. Welch | 2008-03-18 |
| 7336361 | Spectroscopic ellipsometer and polarimeter systems | Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green +1 more | 2008-02-26 |
| 7327456 | Spectrophotometer, ellipsometer, polarimeter and the like systems | Steven E. Green, Ping He, Blaine D. Johs, Craig M. Herzinger, Galen L. Pfeiffer +3 more | 2008-02-05 |
| 7317529 | Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples | Martin M. Liphardt, Ping He, Blaine D. Johs, Galen L. Pfeiffer, James D. Welch | 2008-01-08 |
| 7304792 | System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidence | Martin M. Liphardt | 2007-12-04 |
| 7304737 | Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence | Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green +1 more | 2007-12-04 |
| 7295313 | Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters | Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger | 2007-11-13 |
| 7283234 | Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surface | Blaine D. Johs, Thomas E. Tiwald, Martin M. Liphardt, James D. Welch | 2007-10-16 |
| 7277171 | Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems | Blaine D. Johs, Ping He, Martin M. Liphardt, Christopher A. Goeden, James D. Welch | 2007-10-02 |
| 7274450 | Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems | Steven E. Green, Ping He, Galen L. Pfeiffer, Brian D. Guenther, Gerald T. Cooney +3 more | 2007-09-25 |
| 7265838 | Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like | Blaine D. Johs, Ping He, Martin M. Liphardt, Christopher A. Goeden, James D. Welch | 2007-09-04 |
| 7253900 | Ellipsometer or polarimeter and the like system with multiple detector element detector in environmental control chamber including secure sample access | Gregory K. Pribil, Martin M. Liphardt, James D. Welch | 2007-08-07 |
| 7245376 | Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter | Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green +1 more | 2007-07-17 |
| 7215424 | Broadband ellipsometer or polarimeter system including at least one multiple element lens | Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green +1 more | 2007-05-08 |
| 7215423 | Control of beam spot size in ellipsometer and the like systems | Martin M. Liphardt, Blaine D. Johs, James D. Welch | 2007-05-08 |
| 7209234 | Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of material deposited from a fluid | James D. Welch | 2007-04-24 |
| 7193710 | Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses | Blaine D. Johs, Martin M. Liphardt, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green +1 more | 2007-03-20 |
| 7158231 | Spectroscopic ellipsometer and polarimeter systems | Blaine D. Johs, Craig M. Herzinger, Ping He, Martin M. Liphardt, Galen L. Pfeiffer | 2007-01-02 |
| 7057717 | System for and method of investigating the exact same point on a sample substrate with at least two wavelengths | Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger, Ping He, Christopher A. Goeden +1 more | 2006-06-06 |
| 7030982 | Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of accumulated material | James D. Welch | 2006-04-18 |
| 6982792 | Spectrophotometer, ellipsometer, polarimeter and the like systems | Steven E. Green, Ping He, Blaine D. Johs, Craig M. Herzinger, Galen L. Pfeiffer +2 more | 2006-01-03 |
| 6940595 | Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters | Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger | 2005-09-06 |
| 6937341 | System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation | Galen L. Pfeiffer, Daniel W. Thompson, Blaine D. Johs, Craig M. Herzinger | 2005-08-30 |
| 6859278 | Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems | Blaine D. Johs, Ping He, Martin M. Liphardt, Christopher A. Goeden, James D. Welch | 2005-02-22 |