Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8709162 | Active cooling substrate support | Samuel Leung, Su Ho Cho | 2014-04-29 |
| 7834994 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | Paohuei Lee, Kyung Tae Kim, Sam Kim, Toshio Kiyotake, Takayuki Matsumoto +4 more | 2010-11-16 |
| 7587812 | Electronic device manufacturing component with an embedded chip and methods of using the same | Paohuei Lee, Suhail Anwar, Janusz Jozwiak | 2009-09-15 |
| 7440091 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | Paohuei Lee, Kyung Tae Kim, Sam Kim, Toshio Kiyotake, Takayuki Matsumoto +4 more | 2008-10-21 |
| 7270713 | Tunable gas distribution plate assembly | Wendell T. Blonigan, John M. White | 2007-09-18 |
| 6924462 | Pedestal for flat panel display applications | Ericka M. Ramirez, Stephen C. Wolgast | 2005-08-02 |
| 6528767 | Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications | Ericka M. Ramirez, Stephen C. Wolgast | 2003-03-04 |
| 6510888 | Substrate support and method of fabricating the same | Naomi Matsumura, Masahiko Kowaka, Akira Terashi, Hideaki Kondo | 2003-01-28 |
| 4654147 | Automated system for continuous monitoring and control of the amount of dissolved oxygen in a plurality of marine life farming pools or sewage treatment installations | — | 1987-03-31 |