Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12110586 | Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers | Adrien LaVoie, Michael Philip Roberts, Chloe Baldasseroni, Ramesh Chandrasekharan | 2024-10-08 |
| 11286560 | Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matching | Chloe Baldasseroni, Nishanth Manjunath | 2022-03-29 |
| 10840061 | Substrate processing chamber including conical surface for reducing recirculation | Ryan Blaquiere, Shankar Swaminathan | 2020-11-17 |
| 10697059 | Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matching | Chloe Baldasseroni, Nishanth Manjunath | 2020-06-30 |
| 10658172 | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer | Joseph R. Abel, Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie | 2020-05-19 |
| 10629435 | Doped ALD films for semiconductor patterning applications | Shankar Swaminathan, Adrien LaVoie | 2020-04-21 |
| 10431451 | Methods and apparatuses for increasing reactor processing batch size | Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie | 2019-10-01 |
| 10403474 | Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system | Ryan Blaquiere, Shankar Swaminathan | 2019-09-03 |
| 10269559 | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer | Joseph R. Abel, Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie | 2019-04-23 |
| 6408440 | Protective vest | — | 2002-06-25 |
| 5903490 | Customizable integrated circuit device | Eran Rotem, Uzi Yoeli | 1999-05-11 |
| 5306970 | Sense amplifier and method for its operation | — | 1994-04-26 |
| 5187429 | Reference voltage generator for dynamic random access memory | — | 1993-02-16 |
| 5148165 | CMOS digital to analog signal converter circuit | — | 1992-09-15 |