ZG

Zhe Gui

Lam Research: 13 patents #216 of 2,128Top 15%
NS Novellus Systems: 4 patents #207 of 780Top 30%
Overall (All Time): #263,905 of 4,157,543Top 7%
17
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12359311 Conformal deposition of silicon carbide films using heterogeneous precursor interaction Matthew Scott Weimer, Bhadri N. Varadarajan, Bo Gong 2025-07-15
12331402 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more 2025-06-17
12334332 Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors Bhadri N. Varadarajan, Matthew Scott Weimer, Galbokka Hewage Layan Savithra, Bo Gong 2025-06-17
12272547 Conformal deposition of silicon carbide films Bhadri N. Varadarajan, Bo Gong 2025-04-08
12116669 Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Rachel E. Batzer, Galbokka Hewage Layan Savithra 2024-10-15
12000047 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more 2024-06-04
11894227 Conformal deposition of silicon carbide films Bhadri N. Varadarajan, Bo Gong 2024-02-06
11702748 Wafer level uniformity control in remote plasma film deposition Geoffrey Hohn, Huatan Qiu, Rachel E. Batzer, Guangbi Yuan 2023-07-18
11608559 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more 2023-03-21
11264234 Conformal deposition of silicon carbide films Bhadri N. Varadarajan, Bo Gong 2022-03-01
11101164 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more 2021-08-24
11015247 Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Rachel E. Batzer, Galbokka Hewage Layan Savithra 2021-05-25
10604841 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more 2020-03-31
10325773 Conformal deposition of silicon carbide films Bhadri N. Varadarajan, Bo Gong 2019-06-18
10319582 Methods and apparatus for depositing silicon oxide on metal layers Bhadri N. Varadarajan, Bo Gong, Andrew John McKerrow 2019-06-11
10297442 Remote plasma based deposition of graded or multi-layered silicon carbide film Bhadri N. Varadarajan, Bo Gong, Guangbi Yuan, Fengyuan Lai 2019-05-21
9837270 Densification of silicon carbide film using remote plasma treatment Bhadri N. Varadarajan, Bo Gong, Guangbi Yuan, Fengyuan Lai 2017-12-05