Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394606 | Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber | Zheng John Ye, Andrew Lam, Jianhua Zhou, Hshiang AN, Suhail Anwar +2 more | 2025-08-19 |
| 12381106 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2025-08-05 |
| 12315724 | Helium-free silicon formation | Allison Yau, Sang Jin Kim, Akhil Singhal, Zhijun Jiang, Deenesh Padhi +1 more | 2025-05-27 |
| 12211908 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2025-01-28 |
| 11784229 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2023-10-10 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2023-05-09 |
| 11587789 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2023-02-21 |