Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8487253 | Scanning electron microscope | Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Manabu Yano, Kazunari Asao +1 more | 2013-07-16 |
| 8080790 | Scanning electron microscope | Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Manabu Yano, Kazunari Asao +1 more | 2011-12-20 |
| 7723681 | Observation method with electron beam | Satoru Iwama, Akira Ikegami | 2010-05-25 |
| 6929892 | Method of monitoring an exposure process | Chie Shishido, Hidetoshi Morokuma, Maki Tanaka, Wataru Nagatomo | 2005-08-16 |