Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11608471 | Composition for etching silicon nitride film and etching method using same | Ki Wook Hwang, Sang-Ran Koh, Youn-Jin Cho, Jung Min Choi, Kwen-Woo Han +1 more | 2023-03-21 |
| 10345706 | Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition | Hyun-Ji SONG, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2019-07-09 |
| 10312074 | Method of producing layer structure, layer structure, and method of forming patterns | Min Soo Kim, Hyun-Ji SONG, Sun-Hae Kang, Sung Min Kim, Sung Hwan Kim +15 more | 2019-06-04 |
| 9823566 | Monomer, hardmask composition comprising monomer, and pattern forming method using hardmask composition | Sung Jae Lee, Joon-Young Moon, You-Jung Park, Chul-Ho Lee, Youn-Jin Cho | 2017-11-21 |
| 9725389 | Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition | Yun-Jun Kim, Hwan-Sung Cheon, Youn-Jin Cho, Chung-Heon Lee, Hyo-Young Kwon +1 more | 2017-08-08 |
| 9683114 | Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition | Hea-Jung Kim, Sung Hwan Kim, Youn-Hee Nam, Yun-Jun Kim, Joon-Young Moon +2 more | 2017-06-20 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2017-05-30 |
| 9529257 | Hard mask composition and method for forming pattern using same | Chul-Ho Lee, You-Jung Park, Sung Jae Lee, Youn-Jin Cho, Young Min Kim +1 more | 2016-12-27 |
| 9513546 | Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition | You-Jung Park, Hea-Jung Kim, Yo-Choul PARK, Sung Jae Lee, Chul-Ho Lee +1 more | 2016-12-06 |
| 9371444 | Hardmask composition and method of forming patterns using the hardmask composition | Yoo-Jeong Choi, Yun-Jun Kim, Young Min Kim, Joon-Young Moon, Yu-Shin Park +2 more | 2016-06-21 |
| 9359276 | Monomer for hardmask composition, hardmask composition including monomer, and pattern forming method using hardmask composition | Yoo-Jeong Choi, Hyo-Young Kwon, Youn-Jin Cho, Yun-Jun Kim, Young Min Kim +1 more | 2016-06-07 |
| 9244351 | Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns | Sung Jae Lee, Joon-Young Moon, Youn-Jin Cho, Young Min Kim | 2016-01-26 |
| 8900997 | Method for forming a dual damascene structure of a semiconductor device, and a semiconductor device therewith | Joon-Young Moon, Youn-Jin Cho, Sung Jae Lee, You-Jung Park, Chul-Ho Lee +1 more | 2014-12-02 |