| 12422363 |
Scanning scatterometry overlay metrology |
Amnon Manassen, Andrew V. Hill, Yuri Paskover, Itay Gdor, Yuval Lubashevsky |
2025-09-23 |
| 12399435 |
Grating-over-grating overlay measurement with parallel color per layer |
Amnon Manassen |
2025-08-26 |
| 12066322 |
Single grab overlay measurement of tall targets |
Amnon Manassen, Andrew V. Hill, Avner Safrani |
2024-08-20 |
| 12032300 |
Imaging overlay with mutually coherent oblique illumination |
Andrew V. Hill, Vladimir Levinski, Daria Negri, Amnon Manassen |
2024-07-09 |
| 12001148 |
Enhancing performance of overlay metrology |
Amnon Manassen, Andrew V. Hill, Yossi Simon, Daria Negri, Vladimir Levinski +9 more |
2024-06-04 |
| 11800212 |
Multi-directional overlay metrology using multiple illumination parameters and isolated imaging |
Andrew V. Hill, Amnon Manassen |
2023-10-24 |
| 11592755 |
Enhancing performance of overlay metrology |
Amnon Manassen, Andrew V. Hill, Yossi Simon, Daria Negri, Vladimir Levinski +9 more |
2023-02-28 |