| 11295925 |
Electron gun device |
Hiroshi Yasuda, Tatsuya Shibaoka, Hidekazu Murata |
2022-04-05 |
| 8530857 |
Stage device |
Youichi Shimizu |
2013-09-10 |
| 8390201 |
Multi-column electron beam exposure apparatus and magnetic field generation device |
Hiroshi Yasuda, Takeshi Haraguchi |
2013-03-05 |
| 7919750 |
Electron gun, electron beam exposure apparatus, and exposure method |
Hiroshi Yasuda, Takeshi Haraguchi, Takamasa Satoh, Yoshinori Terui, Seiichi Sakawa +1 more |
2011-04-05 |
| 7777202 |
Electron beam exposure apparatus involving the position and velocity calculation |
Takamasa Satoh |
2010-08-17 |
| 7737421 |
Electron beam exposure apparatus and method for cleaning the same |
Hiroshi Yasuda |
2010-06-15 |
| 6911780 |
Electron beam, generating device, and testing device |
Yoichi Shimizu |
2005-06-28 |
| 6727658 |
Electron beam generating apparatus and electron beam exposure apparatus |
Yoichi Shimizu, Takamasa Satoh, Takeshi Haraguchi |
2004-04-27 |
| 6509568 |
Electrostatic deflector for electron beam exposure apparatus |
Hitoshi Tanaka, Takeshi Haraguchi, Kazuto Ashiwara, Tomohiko Abe, Ryoji Kato |
2003-01-21 |
| 6465796 |
Charge-particle beam lithography system of blanking aperture array type |
Takeshi Haraguchi, Tomohiko Abe |
2002-10-15 |
| 6407398 |
Electron beam exposure apparatus and exposure method |
Masaki Kurokawa, Tatsuro Ohkawa |
2002-06-18 |
| 6268606 |
Electrostatic deflector, for electron beam exposure apparatus, with reduced charge-up |
Tomohiko Abe, Hiroshi Yasuda |
2001-07-31 |
| 6252344 |
Electron gun used in an electron beam exposure apparatus |
Takamasa Satoh, Akio Yamada, Hiroshi Yasuda |
2001-06-26 |
| 6046459 |
Method and system for charged particle beam exposure |
Nobuyuki Yasutake, Kazushi Ishida, Hiroshi Yasuda, Akiyoshi Tsuda, Hitoshi Tanaka |
2000-04-04 |
| 6008495 |
Electron beam exposure device |
Hitoshi Tanaka |
1999-12-28 |
| 5981118 |
Method for charged particle beam exposure with fixed barycenter through balancing stage scan |
Nobuyuki Yasutake, Kazushi Ishida, Hiroshi Yasuda, Akiyoshi Tsuda, Hitoshi Tanaka |
1999-11-09 |
| 5945683 |
Electron beam exposure device |
Tatsuro Ohkawa, Hitoshi Tanaka, Hiroshi Yasuda |
1999-08-31 |
| 5892237 |
Charged particle beam exposure method and apparatus |
Kenichi Kawakami, Hiroshi Yasuda, Akio Yamada, Tatsuro Ohkawa, Mitsuhiro Nakano +1 more |
1999-04-06 |
| 5708276 |
Electron-beam exposure device and a method of detecting a mark position for the device |
Tatsuro Ohkawa, Kawakami Kenichi, Tohru Ikeda, Kazushi Ishida |
1998-01-13 |
