Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101106 | Exposure device | Hitoshi Tanaka | 2021-08-24 |
| 10824077 | Exposure device | Hitoshi Tanaka | 2020-11-03 |
| 8992086 | X-Y constraining unit, and stage apparatus and vacuum stage apparatus including the same | Kouji Akashi, Yoshihisa Oae | 2015-03-31 |
| 8530857 | Stage device | Yoshihisa Ooae | 2013-09-10 |
| 8382911 | Stage device and stage cleaning method | Yoshihisa Oae | 2013-02-26 |
| 8281794 | Stage device and stage cleaning method | Yoshihisa Oae | 2012-10-09 |
| 5129366 | Deaeration system for a boiler | Yoshihiro Chikamori, Yoshihiko Shibata, Takushi Yokota | 1992-07-14 |
| 5123937 | Deaerating film and deaerating method | Yoshihiko Shibata, Yoshihiro Chikamori | 1992-06-23 |
| 5098562 | Apparatus for treating deaerated water | Yoshihiko Shibata, Yoshihiro Chikamori | 1992-03-24 |
| 4985054 | Foam-bursting device | Yoshihiko Shibata, Yoshihiro Chikamori | 1991-01-15 |
| 4442456 | Solid-state imaging device | Yoshio Iwata, Tsutomu Fujita, Tsunehisa Horiuchi | 1984-04-10 |