Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8992086 | X-Y constraining unit, and stage apparatus and vacuum stage apparatus including the same | Youichi Shimizu, Yoshihisa Oae | 2015-03-31 |
| 6677767 | Displacement sensor | Masahiro Kimura, Kiyohiro Fukaya, Keiji Yasuda | 2004-01-13 |
| 6586951 | Displacement detecting device | Yuji Hiraiwa, Keiji Yasuda | 2003-07-01 |
| 5847640 | Variable resistor | Kiyohiro Fukaya, Yukihiro Kato, Akikazu Matsumoto, Yukihisa Oda | 1998-12-08 |