| 12191115 |
Dual RF for controllable film deposition |
Venkata Sharat Chandra Parimi, Zheng John Ye, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Lu Xu +1 more |
2025-01-07 |
| 12062536 |
Amorphous carbon for gap fill |
Kwangduk Douglas Lee |
2024-08-13 |
| 12027366 |
Reduced hydrogen deposition processes |
Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee |
2024-07-02 |
| 11821082 |
Reduced defect deposition processes |
Byung Ik Song, Hyung Je Woo, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee |
2023-11-21 |
| 11600470 |
Targeted heat control systems |
Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Sarah Michelle Bobek, Sungwon Ha, Prashant Kumar Kulshreshtha +1 more |
2023-03-07 |
| 11322352 |
Nitrogen-doped carbon hardmask films |
Lu Xu, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee |
2022-05-03 |
| 10950445 |
Deposition of metal silicide layers on substrates and chamber components |
Prashant Kumar Kulshreshtha, Jiarui Wang, Kwangduk Douglas Lee, Milind Gadre, Paul Connors |
2021-03-16 |
| 10734232 |
Deposition of metal silicide layers on substrates and chamber components |
Prashant Kumar Kulshreshtha, Jiarui Wang, Kwangduk Douglas Lee, Milind Gadre, Paul Connors |
2020-08-04 |
