Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7704897 | HDP-CVD SiON films for gap-fill | Hemant P. Mungekar, Young S. Lee, Agnieszka Jakubowicz, Zhong Qiang Hua, Rionard Purnawan +1 more | 2010-04-27 |
| 7196021 | HDP-CVD deposition process for filling high aspect ratio gaps | Zhengquan Tan, Dongqing Li | 2007-03-27 |
| 6929700 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Dongqing Li, Tetsuya Ishikawa | 2005-08-16 |
| 6914016 | HDP-CVD deposition process for filling high aspect ratio gaps | Zhengquan Tan, Dongqing Li | 2005-07-05 |
| 6740601 | HDP-CVD deposition process for filling high aspect ratio gaps | Zhengquan Tan, Dongqing Li | 2004-05-25 |
| 6596653 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Dongqing Li, Tetsuya Ishikawa | 2003-07-22 |
| 6579811 | Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps through wafer heating | Pravin K. Narwankar, Sameer Desai, Turgut Sahin, Laxman Murugesh | 2003-06-17 |
| 6200911 | Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps using differential plasma power | Pravin K. Narwankar, Sameer Desai, Turgut Sahin, Laxman Murugesh | 2001-03-13 |