Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7132353 | Boron diffusion barrier by nitrogen incorporation in spacer dielectrics | Li-Qun Xia, Mei-Yee Shek, Vladamir Zubkov, Ritwik Bhatia | 2006-11-07 |
| 6946033 | Heated gas distribution plate for a processing chamber | Lun Tsuei, Soovo Sen, Ju-Hyung Lee, Juan Carlos Rocha-Alvarez, Inna Shmurun +2 more | 2005-09-20 |
| 6923189 | Cleaning of CVD chambers using remote source with cxfyoz based chemistry | Annamalai Lakshmanan, Ju-Hyung Lee, Maosheng Zhao, Shankar Venkataraman | 2005-08-02 |