Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293901 | Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devices | Woorim LEE, Inseong KIM, Gonjun KIM, Younghoo Kim | 2025-05-06 |
| 11990348 | Wafer processing apparatus and wafer processing method using the same | Chanyeong Jeong, Hoseop Choi, Dongkyu Shin, Sangjin An | 2024-05-21 |
| 11798788 | Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode | Sang Ki Nam, Sungyong Lim, Beomjin Yoo, Akira Koshiishi, Vasily Pashkovskiy +1 more | 2023-10-24 |
| 11289308 | Apparatus and method for processing substrate and method of manufacturing semiconductor device using the method | Sangjin An, Minseop PARK, Chanyeong Jeong, Yeongkwang Lee | 2022-03-29 |
| 10950414 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Sang Ki Nam, Akira Koshiishi, Kwangyoub Heo, Beomjin Yoo, Sungyong Lim +1 more | 2021-03-16 |
| 10522332 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sang Ki Nam, Kwangyoub Heo, Kyuhee Han | 2019-12-31 |
| 10347468 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sang Ki Nam, Kwangyoub Heo, Kyuhee Han | 2019-07-09 |