Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10324046 | Methods and systems for monitoring a non-defect related characteristic of a patterned wafer | Tao-Yi Fu, Lisheng Gao, Xuguang Jiang, Ping Gu, Sylvain Muckenhirn | 2019-06-18 |
| 8384887 | Methods and systems for inspection of a specimen using different inspection parameters | Paul Frank Marella, Nat Ceglio, Shiow-Hwei Hwang, Tao-Yi Fu | 2013-02-26 |
| 7738089 | Methods and systems for inspection of a specimen using different inspection parameters | Paul Frank Marella, Nat Ceglio, Shiow-Hwei Hwang, Tao-Yi Fu | 2010-06-15 |
| 7142315 | Slit confocal autofocus system | Charles E. Wayman | 2006-11-28 |
| 6362923 | Lens for microscopic inspection | David Shafer | 2002-03-26 |