Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12101073 | Method for determining a cleanliness of a cleaning member | Chikako TAKATOH, Megumi Uno, Masahito Abe, Toshiya Kon, Yumiko Nakamura | 2024-09-24 |
| 8205625 | Apparatus and method for surface treatment of substrate, and substrate processing apparatus and method | Hideki Tateishi, Tsutomu Nakada, Akira Susaki, Yukio Fukunaga | 2012-06-26 |
| 7262849 | Method of polishing thin film formed on substrate | Akira Fukunaga | 2007-08-28 |
| 6552434 | Semiconductor device and manufacturing method thereof | Masahiko Hasunuma, Hisashi Kaneko, Sachiyo Ito | 2003-04-22 |
| 6403462 | Method for manufacturing high reliability interconnection having diffusion barrier layer | Masahiko Hasunuma, Hisashi Kaneko, Sachiyo Ito | 2002-06-11 |
| 5723367 | Wiring forming method | Junichi Wada | 1998-03-03 |