Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360510 | Large spot spectral sensing to control spatial setpoints | Ye Feng, Rajan Arora, Jorge Luque | 2025-07-15 |
| 11056322 | Method and apparatus for determining process rate | Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Thorsten Lill | 2021-07-06 |
| 10325760 | System, method and apparatus for using optical data to monitor RF generator operations | John C. Valcore, Jr., Tony San | 2019-06-18 |
| 9752981 | Apparatus with a spectral reflectometer for processing substrates | Dmitry Opaits | 2017-09-05 |
| 9735069 | Method and apparatus for determining process rate | Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Thorsten Lill | 2017-08-15 |
| 9627186 | System, method and apparatus for using optical data to monitor RF generator operations | John C. Valcore, Jr., Tony San | 2017-04-18 |
| 9036676 | Catalytic generation of metastable singlet oxygen | W. Terry Rawlins, Steven J. Davis | 2015-05-19 |
| 8670475 | Catalytic generation of metastable singlet oxygen | W. Terry Rawlins, Steven J. Davis | 2014-03-11 |
| 8432949 | High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers | W. Terry Rawlins, David B. Oakes, Steven J. Davis | 2013-04-30 |
| 7817699 | High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers | W. Terry Rawlins, David B. Oaks, Steven J. Davis | 2010-10-19 |