| 6590216 |
Servo control for high emittance electron source |
Steven D. Golladay |
2003-07-08 |
| 6466324 |
Servo guided stage system with yaw sensor |
— |
2002-10-15 |
| 6456019 |
Real time measurement of leakage current in high voltage electron guns |
Michael S. Gordon |
2002-09-24 |
| 6388516 |
Precision high speed magnetic coil driver circuit |
William A. Enichen |
2002-05-14 |
| 5739654 |
Precision tool control system for a workpiece positioning apparatus |
Erwin E. Weissmann |
1998-04-14 |
| 5716742 |
Real time alignment system for a projection electron beam lithographic system |
— |
1998-02-10 |
| 5648188 |
Real time alignment system for a projection electron beam lithographic system |
— |
1997-07-15 |
| 5585629 |
Electron beam nano-metrology system |
William A. Enichen, Timothy R. Groves, Rodney A. Kendall, Henri A. Khoury, Richard D. Moore +2 more |
1996-12-17 |
| 5548195 |
Compensated servo control stage positioning apparatus |
— |
1996-08-20 |
| 5140242 |
Servo guided stage system |
Rodney A. Kendall |
1992-08-18 |
| 4818885 |
Electron beam writing method and system using large range deflection in combination with a continuously moving table |
Donald E. Davis, Merlyn H. Perkins, Hans C. Pfeiffer |
1989-04-04 |
| 4568861 |
Method and apparatus for controlling alignment and brightness of an electron beam |
Donald F. Haire, Ralph R. Trotter |
1986-02-04 |
| 4468565 |
Automatic focus and deflection correction in E-beam system using optical target height measurements |
William Blair, Guenther O. Langner |
1984-08-28 |
