Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650628 | Simultaneous deflections in charged-particle beams | Michael S. Gordon, Paul F. Petric, James D. Rockrohr | 1997-07-22 |
| 4821196 | High resolution automatic focus correction electronic subsystem for E-beam lithography | Thomas Kevin Collopy | 1989-04-11 |
| 4568861 | Method and apparatus for controlling alignment and brightness of an electron beam | Samuel K. Doran, Ralph R. Trotter | 1986-02-04 |