Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12253472 | System and method for detecting a defect in a specimen | Richard P. Good, Matthias Ruhm, Dirk Wollstein | 2025-03-18 |
| 9966315 | Advanced process control methods for process-aware dimension targeting | Philipp Jaschinsky, Frank Kahlenberg, Sirko Kramp, Rolf Seltmann | 2018-05-08 |
| 8518820 | Methods for forming contacts in semiconductor devices | Klaus Herold, Jenny Lian, Sajan Marokkey, Martin Ostermayr | 2013-08-27 |
| 7674703 | Gridded contacts in semiconductor devices | Klaus Herold, Jenny Lian, Sajan Marokkey, Martin Ostermayr | 2010-03-09 |