Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359694 | Lithographic mask for EUV lithography | Koen D'have | 2019-07-23 |
| 10353284 | Lithographic reticle system | Cedric Huyghebaert, Emily Gallagher | 2019-07-16 |
| 9086638 | Detection of contamination in EUV systems | Anne-Marie Goethals, Gian Francesco Lorusso, Ivan Pollentier | 2015-07-21 |
| 8006202 | Systems and methods for UV lithography | Gian Francesco Lorusso, In-Sung Kim, Byeong-Soo Kim, Anne-Marie Goethals, Jan Hermans | 2011-08-23 |
| 7750319 | Method and system for measuring contamination of a lithographical element | Gian Francesco Lorusso, Anne-Marie Goethals, Jan Hermans | 2010-07-06 |
| 5624773 | Resolution-enhancing optical phase structure for a projection illumination system | Rainer Pforr, Kurt G. M. Ronse, Luc M. M. L. Van Den Hove | 1997-04-29 |