Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5624773 | Resolution-enhancing optical phase structure for a projection illumination system | Rainer Pforr, Kurt G. M. Ronse, Rik Jonckheere | 1997-04-29 |
| 5223377 | Interrupted developing process for a photoresist image | Nandasiri Samarakone, Patrick Jaenen | 1993-06-29 |