| 10017376 |
MEMS element including a stress decoupling structure and a component including such a MEMS element |
Johannes Classen, Jochen Reinmuth, Mirko Hattass, Antoine Puygranier |
2018-07-10 |
| 9416000 |
Component including two semiconductor elements, between which at least two hermetically sealed cavities are formed and method for establishing a corresponding bonding connection between two semiconductor elements |
Christoph Schelling, Jens Frey, Antoine Puygranier |
2016-08-16 |
| 9032608 |
Method for manufacturing at least one mechanical-electrical energy conversion system |
Franz Laermer, Thorsten Pannek, Marian Keck |
2015-05-19 |
| 8987921 |
Multifunction sensor as PoP microwave PCB |
Ulrike Scholz |
2015-03-24 |
| 8939165 |
Microvalve, micropump and manufacturing method |
Peter Rothacher |
2015-01-27 |
| 8671746 |
Piezoelectric generator |
Franz Laermer, Thorsten Pannek, Marian Keck |
2014-03-18 |
| 8638000 |
Micromechanical method and corresponding assembly for bonding semiconductor substrates and correspondingly bonded semiconductor chip |
Achim Trautmann |
2014-01-28 |
| 8607450 |
Method for manufacturing a micropump and micropump |
Julia Cassemeyer, Michael Stumber, Franz Laermer |
2013-12-17 |
| 8492850 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type |
Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Silvia Kronmueller +4 more |
2013-07-23 |
| 8429971 |
Multiaxial micromechanical acceleration sensor |
Johannes Classen, Axel Franke, Dietrich Schubert, Kersten Kehr |
2013-04-30 |
| 8377315 |
Method for manufacturing porous microstructures, porous microstructures manufactured according to this method, and the use thereof |
Dick Scholten, Tjalf Pirk, Michael Stumber, Franz Laermer, Ando Feyh |
2013-02-19 |
| 8154174 |
Bending transducer device for generating electrical energy from deformations and circuit module |
Franz Laermer, Thorsten Pannek, Marian Keck |
2012-04-10 |
| 8148234 |
Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure |
Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Silvia Kronmueller +4 more |
2012-04-03 |
| 8113059 |
Circuit module |
Thomas Buck |
2012-02-14 |
| 8040023 |
Bending transducer for generating electrical energy from mechanical deformations |
Franz Laermer, Thorsten Pannek, Marian Keck |
2011-10-18 |
| 7919907 |
Circuit module |
Marian Keck |
2011-04-05 |
