Issued Patents All Time
Showing 1–25 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387137 | Self-centering susceptor ring assembly | Robert C. Haro | 2022-07-12 |
| 9551069 | Reaction apparatus having multiple adjustable exhaust ports | Jeroen Stoutjesdijk | 2017-01-24 |
| 9297705 | Smart temperature measuring device | Rand Conner | 2016-03-29 |
| 9267850 | Thermocouple assembly with guarded thermocouple junction | Robert C. Haro | 2016-02-23 |
| 8927435 | Load lock having secondary isolation chamber | Jeroen Stoutjesdijk, Eric Hill, Loring G. Davis, John DiSanto | 2015-01-06 |
| 8801857 | Self-centering susceptor ring assembly | Robert C. Haro | 2014-08-12 |
| 8616765 | Thermocouple | Buz Darabnia, Andy Yednak, Mike Halpin, Loren Jacobs | 2013-12-31 |
| 8486191 | Substrate reactor with adjustable injectors for mixing gases within reaction chamber | Rand Conner, John DiSanto, James A. Alexander | 2013-07-16 |
| 8440048 | Load lock having secondary isolation chamber | Jeroen Stoutjesdijk, Eric Hill, Loring G. Davis, John DiSanto | 2013-05-14 |
| 8394229 | Susceptor ring | Bob Haro | 2013-03-12 |
| 8382370 | Thermocouple assembly with guarded thermocouple junction | Robert C. Haro | 2013-02-26 |
| 8262287 | Thermocouple | Buz Darabnia, Andy Yednak, Mike Halpin, Loren Jacobs | 2012-09-11 |
| 8100583 | Thermocouple | Rand Conner | 2012-01-24 |
| 8088225 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Mike Halpin, Tony Keeton, Mark Hawkins +7 more | 2012-01-03 |
| 8067061 | Reaction apparatus having multiple adjustable exhaust ports | Jeroen Stoutjesdijk | 2011-11-29 |
| 8047706 | Calibration of temperature control system for semiconductor processing chamber | Matthew G. Goodman, Mark Hawkins, Michael Eugene Givens, Eric Hill, Gregory Bartlett | 2011-11-01 |
| 7993057 | Redundant temperature sensor for semiconductor processing chambers | Mark Kleshock, Loren Jacobs | 2011-08-09 |
| 7725012 | Movable radiant heat sources | Jeroen Stoutjesdijk | 2010-05-25 |
| 7648579 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Mike Halpin, Tony Keeton, Mark Hawkins +7 more | 2010-01-19 |
| D600223 | Susceptor ring | Bob Haro | 2009-09-15 |
| 7585142 | Substrate handling chamber with movable substrate carrier loading platform | Jeroen Stoutjesdijk | 2009-09-08 |
| 7449071 | Wafer holder with peripheral lift ring | Tony Keeton, Matthew G. Goodman | 2008-11-11 |
| 7231141 | High temperature drop-off of a substrate | Paul Jacobson, Ivo Raaijmakers, Robert C. Haro | 2007-06-12 |
| 7159846 | Slit valve for a semiconductor processing system | Jim Kusbel, Jerry Davis | 2007-01-09 |
| 7147720 | Non-contact cool-down station for wafers | Bob Haro | 2006-12-12 |