Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551069 | Reaction apparatus having multiple adjustable exhaust ports | Ravinder Aggarwal | 2017-01-24 |
| 8927435 | Load lock having secondary isolation chamber | Ravinder Aggarwal, Eric Hill, Loring G. Davis, John DiSanto | 2015-01-06 |
| 8440048 | Load lock having secondary isolation chamber | Ravinder Aggarwal, Eric Hill, Loring G. Davis, John DiSanto | 2013-05-14 |
| 8067061 | Reaction apparatus having multiple adjustable exhaust ports | Ravinder Aggarwal | 2011-11-29 |
| 7725012 | Movable radiant heat sources | Ravinder Aggarwal | 2010-05-25 |
| 7585142 | Substrate handling chamber with movable substrate carrier loading platform | Ravinder Aggarwal | 2009-09-08 |
| 6481945 | Method and device for transferring wafers | Albert Hasper, Frank Huussen, Cornelis Kooijman, Theodorus Gerardus Maria Oosterlaken, Jack Herman Van Putten +3 more | 2002-11-19 |
| 6413081 | Method for purging a furnace and furnace assembly | Pieter Johannes Quintus van Voorst Vader, Theodorus Michael De Rooij, Cornelis Kooijman | 2002-07-02 |
| 6225602 | Vertical furnace for the treatment of semiconductor substrates | Jacobus Pieter Buijze, Christianus Gerardus Maria De Ridder, Hubertus Johannes Julius Stohr | 2001-05-01 |
| 6132207 | Discharge system for a reactor, and process system provided with a discharge system of this kind | — | 2000-10-17 |