| 6599076 |
Dual cassette load lock |
Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +1 more |
2003-07-29 |
| 6454508 |
Dual cassette load lock |
Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +1 more |
2002-09-24 |
| 6454519 |
Dual cassette load lock |
Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more |
2002-09-24 |
| 6011622 |
Particle monitoring system |
Boris Fishkin |
2000-01-04 |
| 5848670 |
Lift pin guidance apparatus |
— |
1998-12-15 |
| 5769588 |
Dual cassette load lock |
Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more |
1998-06-23 |
| 5753044 |
RF plasma reactor with hybrid conductor and multi-radius dome ceiling |
Hiroji Hanawa, Gerald Yin, Diana Xiabing Ma, Peter Loewenhardt, Allen Zhao |
1998-05-19 |
| 5565985 |
Particle monitoring sensor |
Boris Fishkin |
1996-10-15 |
| 5525759 |
Pin-shaped feedthrough |
— |
1996-06-11 |
| 5463460 |
Particle monitoring sensor |
Boris Fishkin |
1995-10-31 |
| 5186594 |
Dual cassette load lock |
Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more |
1993-02-16 |
