| 7324917 |
Method, system, and software for evaluating characteristics of a surface with reference to its edge |
Chris L. Koliopoulos, Jaydeep Sinha, Delvin A. Lindley, John F. Valley |
2008-01-29 |
| 7175214 |
Wafer gripping fingers to minimize distortion |
Jaydeep Sinha, Domenico Tortola |
2007-02-13 |
| 6025787 |
Apparatus and methods for measurement system calibration |
Scott Keller, Roy S. Mallory |
2000-02-15 |
| 5988971 |
Wafer transfer robot |
Michael E. Fossey, Kirk R. Johnson |
1999-11-23 |
| 5642298 |
Wafer testing and self-calibration system |
Roy E. Mallory, Peter L. Domenicali, Alexander Belyaev, Peter A. Harvey, Richard Scott Smith |
1997-06-24 |
| 5557267 |
Apparatus and methods for measurement system calibration |
Scott Keller, Roy S. Mallory |
1996-09-17 |
| 5511005 |
Wafer handling and processing system |
Robert C. Abbe, Randal K. Goodall, Peter L. Domenicali |
1996-04-23 |
| 5456561 |
Robot prealigner |
Roy S. Mallory |
1995-10-10 |
| 5332352 |
Robot prealigner |
Roy S. Mallory |
1994-07-26 |
| 5102280 |
Robot prealigner |
Roy S. Mallory |
1992-04-07 |
| 4958129 |
Prealigner probe |
Roy E. Mallory |
1990-09-18 |
| 4918376 |
A.C. capacitive gauging system |
Roy S. Mallory |
1990-04-17 |
| 4910453 |
Multi-probe grouping system with nonlinear error correction |
Robert C. Abbe |
1990-03-20 |
| 4860229 |
Wafer flatness station |
Robert C. Abbe, Neil Judell |
1989-08-22 |
| 4849916 |
Improved spatial resolution measurement system and method |
Robert C. Abbe, Neil Judell |
1989-07-18 |
| 4750141 |
Method and apparatus for separating fixture-induced error from measured object characteristics and for compensating the measured object characteristic with the error, and a bow/warp station implementing same |
Neil Judell |
1988-06-07 |
| 4692695 |
Conductivity-type sensor |
— |
1987-09-08 |
| 4457664 |
Wafer alignment station |
Neil Judell, Robert C. Abbe, Roy E. Mallory |
1984-07-03 |
| 4353029 |
Self inverting gauging system |
Robert C. Abbe |
1982-10-05 |
| 4228392 |
Second order correction in linearized proximity probe |
Robert C. Abbe, Daniel Klein |
1980-10-14 |
| 4217542 |
Self inverting gauging system |
Robert C. Abbe |
1980-08-12 |