Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5008702 | Exposure method and apparatus | Tsutomu Tanaka, Yoshitada Oshida, Masataka Shiba, Ryuichi Funatsu | 1991-04-16 |
| 4993837 | Method and apparatus for pattern detection | Yoshitada Oshida, Yasuhiro Yoshitake, Masataka Shiba | 1991-02-19 |
| 4862008 | Method and apparatus for optical alignment of semiconductor by using a hologram | Yoshitada Oshida, Yasuhiro Yoshitake | 1989-08-29 |
| 4819033 | Illumination apparatus for exposure | Yasuhiro Yoshitake, Yoshitada Oshida, Masataka Shiba | 1989-04-04 |
| 4779986 | Reduction projection system alignment method and apparatus | Yoshitada Oshida | 1988-10-25 |
| 4744666 | Alignment detection optical system of projection type aligner | Yoshitada Oshida, Toshihiko Nakata | 1988-05-17 |
| 4701050 | Semiconductor exposure apparatus and alignment method therefor | Yoshitada Oshida, Masataka Shiba, Toshihiko Nakata, Sachio Uto | 1987-10-20 |
| 4668089 | Exposure apparatus and method of aligning exposure mask with workpiece | Yoshitada Oshida, Masataka Shiba, Toshihiko Nakata, Mitsuyoshi Koizumi | 1987-05-26 |