Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075690 | Diffuser gravity support | Ernst Keller, John M. White, Robin L. Tiner, Jiri Kucera, Soo Young Choi +1 more | 2011-12-13 |
| 7461794 | Substrate temperature regulating support pins | Hien Minh Le | 2008-12-09 |
| 7429410 | Diffuser gravity support | Ernst Keller, John M. White, Robin L. Tiner, Jiri Kucera, Soo Young Choi +1 more | 2008-09-30 |
| 6257045 | Automated substrate processing systems and methods | Akihiro Hosokawa, Richard E. Demaray, Makoto Inagawa, Ravi Mullapudi, Harlan L. Halsey | 2001-07-10 |
| 6205870 | Automated substrate processing systems and methods | Akihiro Hosokawa, Richard E. Demaray, Makoto Inagawa, Ravi Mullapudi, Harlan L. Halsey | 2001-03-27 |
| 5957029 | Linear thruster | Peter W. Boyer, Steven J. Breese, Daniel L. Choisser, Kevin R. Douglas, David S. Harris +2 more | 1999-09-28 |
| 5865089 | Linear thruster | John W. Langer | 1999-02-02 |