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CMOS integrated moving-gate transducer with silicon as a functional layer |
Ando Feyh, Po-Jui Chen |
2017-08-08 |
| 9255000 |
CMOS integrated moving-gate transducer with silicon as a functional layer |
Ando Feyh, Po-Jui Chen |
2016-02-09 |
| 9003885 |
Tri-axis accelerometer having a single proof mass and fully differential output signals |
Zhiyu Pan, Christoph Lang, Gary Yama, Matthias Metz |
2015-04-14 |
| 8786419 |
Method for controlling a device and a device for controlling the device |
Mathias Reimann, Harald Emmerich, Udo-Martin Gomez, Emma Abel |
2014-07-22 |
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Tri-axis accelerometer having a single proof mass and fully differential output signals |
Zhiyu Pan, Christoph Lang, Gary Yama, Matthias Metz |
2013-04-16 |
| 8276446 |
Sensor device |
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2012-10-02 |
| 8020266 |
Method of producing a device |
Brian Stark, Matthias Metz |
2011-09-20 |
| 7898046 |
Microelectromechanical systems encapsulation process |
Brian Stark, Matthias Metz, Tino Fuchs, Franz Laermer, Silvia Kronmueller |
2011-03-01 |
| 7757555 |
Tri-axis accelerometer having a single proof mass and fully differential output signals |
Zhiyu Pan, Christoph Lang, Gary Yama, Matthias Metz |
2010-07-20 |
| 7671515 |
Microelectromechanical devices and fabrication methods |
Matthias Metz, Zhiyu Pan, Brian Stark, Gary Yama |
2010-03-02 |
| 7625773 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same |
Markus Lutz, Aaron Partridge, Wilhelm Frey, Matthias Metz, Brian Stark +1 more |
2009-12-01 |
| 7582514 |
Microelectromechanical systems encapsulation process with anti-stiction coating |
Cyril Vancura, Brian Stark, Matthias Metz, Tino Fuchs, Franz Laermer +1 more |
2009-09-01 |
| 7563633 |
Microelectromechanical systems encapsulation process |
Brian Stark, Matthias Metz, Tino Fuchs, Franz Laermer, Silvia Kronmueller |
2009-07-21 |
| 7535325 |
Component for impedance change in a coplanar waveguide and method for producing a component |
Roland Mueller-Fiedler, Mathias Reimann, Thomas Buck |
2009-05-19 |
| 7449355 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same |
Markus Lutz, Aaron Partridge, Wilhelm Frey, Matthias Metz, Brian Stark +1 more |
2008-11-11 |
| 7414351 |
Energy harvesting device manufactured by print forming processes |
Brian Stark, Matthias Metz |
2008-08-19 |
| 7229694 |
Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component |
Lutz Mueller, Kersten Kehr |
2007-06-12 |
| 7224239 |
Structural element having a coplanar line |
Joerg Schoebel |
2007-05-29 |
| 6882255 |
Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch |
Roland Mueller-Fiedler, Thomas Walter |
2005-04-19 |
| 6876268 |
Capacitive finger coupling element on a silicon support for coupling a strip line structure |
Thomas Walter, Stefan Keith, Dirk Steinbuch, Mathias Reimann |
2005-04-05 |
| 6762923 |
Coplanar switch |
Roland Mueller-Fiedler, Thomas Walter |
2004-07-13 |
| 6686810 |
Coplanar waveguide switch |
Roland Mueller-Fiedler, Thomas Walter |
2004-02-03 |
