Issued Patents All Time
Showing 25 most recent of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8767172 | Projection optical device and exposure apparatus | Akimitsu Ebihara, Bausan Yuan | 2014-07-01 |
| D692886 | Folio keyboard for tablet computer | Mathew Bates, John Moriarty, Tarak Fekih, Alexis Richard, Pai-Cheng Chu +1 more | 2013-11-05 |
| 7365513 | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device | — | 2008-04-29 |
| 7333179 | Moving mechanism with high bandwidth response and low force transmissibility | Bausan Yuan, W. Thomas Novak | 2008-02-19 |
| 7061577 | Image adjustor including damping assembly | Bausan Yuan, Takeshi Asami | 2006-06-13 |
| 6989647 | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device | — | 2006-01-24 |
| 6927840 | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device | — | 2005-08-09 |
| 6888620 | System and method for holding a device with minimal deformation | Mike Binnard, Douglas C. Watson | 2005-05-03 |
| 6882126 | Holder mover for a stage assembly | Douglas C. Watson, Mike Binnard, Andrew J. Hazelton | 2005-04-19 |
| 6872958 | Platform positioning system | Gerry B. Andeen, N. William Parker, S. Daniel Miller | 2005-03-29 |
| 6841965 | Guideless stage with isolated reaction stage | — | 2005-01-11 |
| 6747732 | Method of making exposure apparatus with dynamically isolated reaction frame | — | 2004-06-08 |
| 6683433 | Exposure apparatus and method utilizing isolated reaction frame | — | 2004-01-27 |
| 6646719 | Support assembly for an exposure apparatus | Bausan Yuan, Yutaka Hayashi | 2003-11-11 |
| 6590639 | Active vibration isolation system having pressure control | Bausan Yuan, Michael Binnard | 2003-07-08 |
| 6471435 | Flexural joint | — | 2002-10-29 |
| 6355994 | Precision stage | Gerry B. Andeen | 2002-03-12 |
| 6323494 | Vertical direction force transducer | — | 2001-11-27 |
| 6316901 | Exposure apparatus and method utilizing isolated reaction frame | — | 2001-11-13 |
| 6302585 | Two Axis stage with arcuate surface bearings | Michael Sogard | 2001-10-16 |
| 6281654 | Method for making apparatus with dynamic support structure isolation and exposure method | — | 2001-08-28 |
| 6271640 | Exposure apparatus having reaction frame | — | 2001-08-07 |
| 6246202 | Method of making exposure apparatus with dynamically isolated reaction frame | — | 2001-06-12 |
| 6188195 | Exposure method, and method of making exposure apparatus having dynamically isolated support structure | — | 2001-02-13 |
| 6175404 | Exposure apparatus having dynamically isolated reaction frame | — | 2001-01-16 |