Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403507 | Transfer apparatus, cleaning module, and substrate processing apparatus | Asagi Matsugu, Akihiro Yazawa, Hideharu Aoyama, Ayumu Saito, Yusuke Sasaya +4 more | 2025-09-02 |
| 11701750 | Top ring for holding a substrate and substrate processing apparatus | Yu Ishii, Hirotaka Satori, Makoto Kashiwagi | 2023-07-18 |
| 9966245 | Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing article | Kentaro Hiruma, Noboru Osaka | 2018-05-08 |