Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966245 | Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing article | Manato Furusawa, Noboru Osaka | 2018-05-08 |
| 9632423 | Illumination device, exposure apparatus, adjusting method, and method for manufacturing object | Yoshikuni Yoneyama, Noboru Osaka | 2017-04-25 |