Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11698589 | Light source device, illuminating apparatus, exposing apparatus, and method for manufacturing article | — | 2023-07-11 |
| 11320741 | Light source apparatus, illumination apparatus, exposure apparatus, and method for manufacturing object | — | 2022-05-03 |
| 11255514 | Illumination apparatus having planar array of LEDs and movable pair of lens arrays for modifying light output | Yoichi Oeda | 2022-02-22 |
| 10761434 | Substrate holding apparatus, exposure apparatus, and article manufacturing method | Shunya Sakata, Akihiro Takahashi | 2020-09-01 |
| 10698319 | Exposure apparatus, exposure method, and article manufacturing method | — | 2020-06-30 |
| 9966245 | Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing article | Kentaro Hiruma, Manato Furusawa | 2018-05-08 |
| 9632423 | Illumination device, exposure apparatus, adjusting method, and method for manufacturing object | Yoshikuni Yoneyama, Kentaro Hiruma | 2017-04-25 |
| 9280054 | Illumination optical system, exposure apparatus, and method of manufacturing device | — | 2016-03-08 |
| 7843645 | Projection optical system, exposure apparatus, and method of manufacturing device | — | 2010-11-30 |
| 7602474 | Exposure apparatus | Kenichiro Mori, Akihiro Yamada | 2009-10-13 |